Using a mutual impedance model to improve the time response of PMUT arrays

Short pulse transmission and reception is important for piezoelectric micromachined ultrasonic transducer (PMUT) arrays to achieve high resolution. However, coupling effects cause PMUT arrays to exhibit long decay times following the transmit pulse and poor axial resolution. Here, we model the mutual acoustic impedance that couples PMUTs in an array to show that the decay behavior can be accurately predicted. This model provides a basis for improving PMUT time response and imaging resolution.