Design Method For Rapid Customization Of Mems Sensors

This paper reports a novel method that reduces time for design customization of MEMS sensors. In this method, a design database (DB) that contains a variety of structural and characteristic parameter sets is built beforehand. Once required specifications are given, the DB is analyzed to select a candidate structure and obtain a guideline for a structural refinement. The number of time-consuming calculations by finite element method (FEM) is dramatically reduced by this method. In the case of a seesaw-type vibration sensor, it reduced the design customization time by 83%.