High-efficiency UV/optical/NIR detectors for large aperture telescopes and UV explorer missions: development of and field observations with delta-doped arrays

JOURNAL OF ASTRONOMICAL TELESCOPES INSTRUMENTS AND SYSTEMS(2017)

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摘要
Exciting concepts are under development for flagship, probe class, explorer class, and suborbital class NASA missions in the ultraviolet/optical spectral range. These missions will depend on high-performance silicon detector arrays being delivered affordably and in high numbers. To that end, we have advanced delta-doping technology to high-throughput and high-yield wafer-scale processing, encompassing a multitude of state-of-the-art silicon-based detector formats and designs. We have embarked on a number of field observations, instrument integrations, and independent evaluations of delta-doped arrays. We present recent data and innovations from JPL's Advanced Detectors and Systems Program, including two-dimensional doping technology, JPL's end-to-end postfabrication processing of high-performance UV/optical/NIR arrays and advanced coatings for detectors. While this paper is primarily intended to provide an overview of past work, developments are identified and discussed throughout. Additionally, we present examples of past, in-progress, and planned observations and deployments of delta-doped arrays. (C) 2017 Society of Photo-Optical Instrumentation Engineers (SPIE)
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关键词
detectors,delta doping,superlattice doping,UV,two-dimensional doping,atomic layer deposition,coatings,deployment,quantum efficiency,solar-blind silicon,silicon
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