Grain boundary light beam induced current: A characterization of bonded silicon wafers and polycrystalline silicon thin films for diffusion length extraction

PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE(2016)

引用 2|浏览7
暂无评分
摘要
The charge carrier lifetime and accordingly the diffusion length in polycrystalline semiconductor materials is known to be detrimentally influenced by disordered interfaces like grain boundaries (GBs). The GB light beam induced current (GB-LBIC) technique is suitable for the extraction of the minority charge carrier diffusion length in unprocessed polycrystalline materials. This measurement method is based on the GB itself acting as a charge collector. A spatially-resolved light beam induced current can thus be measured even without a collecting p-n junction or Schottky contact, and without biasing the sample. In this contribution we present a simulation based analysis of measured GB-LBIC line scans on bonded silicon wafers and polycrystalline silicon thin films with different laser wavelengths and intensities. (C) 2016 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
更多
查看译文
关键词
diffusion length,grain boundary,laser beam induced current,polycrystalline silicon,TCAD
AI 理解论文
溯源树
样例
生成溯源树,研究论文发展脉络
Chat Paper
正在生成论文摘要