Design and Optimization of SiC Super-Junction MOSFET Using Vertical Variation Doping Profile

In this paper, uniformly doped drift region of silicon carbide (SiC) super-junction (SJ) MOSFET is replaced with vertical variable doping profile (VVD) to achieve a better tradeoff between breakdown voltage (BV) and specific ON-resistance ( ${R}_{\text {sp,on}}$ ). While it is known that the SJ device consists of two vertical columns of n- and p-type, SJ VVD feature lies in increasing the doping concentration from top to bottom in the N-column and vice-versa in the P-column within the drift region. The proposed SJ VVD allows $\text {R}_{{\text {sp, on}}}$ to reduce further due to increased average doping concentration in conducting N-column and BV to increase further due to shifting of an electric field from corners to the center of the drift region. BV and ${R}_{\text {sp,on}}$ improved by 10% in an SJ VVD MOSFET and these parameters follow linear relationship similar to SJ MOSFET. The 2-D numerical simulations from Synopsys TCAD are used for investigating the static and dynamic characteristics of the device. In addition to 30% improvement in Baliga figure of merit, 35% improvement is obtained over SJ MOSFET in turn on and turn off switching energies for a clamped inductive circuit at 1200 V–20 A. Improved dynamic characteristics of SJ VVD can be attributed to reduction in gate charge ( ${Q}_{g}$ ) and miller capacitance ( ${c}_{\text {rss}}$ ) compared to SJ MOSFET.