Simulation of a Love wave device with ZnO nanorods for high mass sensitivity.

Ultrasonics(2018)

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摘要
•3D FE simulation and analysis of Love wave resonator is carried out considering different guiding layer materials.•Polymer layers provide high mass sensitivity, but they cause the coupling coefficient of the device to fall sharply.•ZnO nanorods of appropriate aspect ratio cause coupled resonance leading to increased contact stiffness, average stress, and mass sensitivity.•Nanorod packing density of 25µm−2 provides mass sensitivity 20 times greater than sensitivity of a plain Love wave device.•High mass sensitivity comes at the cost of reduced K2 and increased losses in the device.
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关键词
Coupled resonance,LiTaO3,Love Wave,Mass sensitivity,SAW,ZnO nanorod
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