Design and simulation of pyroelectric detectors with nanometer size spider-web for low thermal conductance

We report the design and simulation of uncooled pyroelectric detectors which utilizes a nanometer sized mesh or truss to support the suspended detector. Pyroelectric detector is a class of thermal detector in which the change in temperature causes the change in the spontaneous polarization in the sensing material. Ca modified lead titanate (PCT) was selected as the thermometer in the detector because of its high pyroelectric figure of merit. The design and simulation of pyroelectric detectors have been conducted by simulating the structure with Intellisuite™. Finite element method (FEM) was used to simulate the structural and thermal properties of the device. The simulated detectors had a spider web-like structure with each of the strut (ring) of spider web had a width of 100 nm. In the design, the pyroelectric detectors utilized Ni 0.8 Cr 0.2 absorber, PCT sensing layer, Ti electrodes, Al 2 O 3 structural layer to obtain low thermal conductance between the detector and Si substrate. Three different types of pyroelectric detectors were designed and analyzed. The first design had linear electrode and simple spider web support. The value of the thermal conductance of this detector was found to be 3.98 × 10 −8 W/K. The second design had a longer thermal path than the first one and the thermal conductivity of this device was found to be 2.41 × 10 −8 W/K. High detectivity was obtained by reducing the thermal conductance between the sensing layer and the substrate or the heat sink in the third design. The design was optimized for the best result by modifying the shape, dimension and thickness of various layers namely absorber, electrodes, sensing layer, and struts. The thermal conductance between the sensor and the substrate using the third design was found to be as low as 4.57 × 10 −9 W/K which is significantly lower than previously reported values. The thicknesses of the web structure, web support, electrodes, sensing layer, and absorber of the final structure were 2, 1, 0.5, 2, and 0.2 µm respectively for this value of thermal conductance. The absorber diameter was 50 µm and the diameter of the spider web was 200 µm. A total of 80 struts with 100 nm width were used in the design.