On-Chip Atomic Force Microscopy: Mechatronic System Design And Control

The atomic force microscope (AFM) has been recognized as an invaluable tool for researchers working in a wide range of nanotechnology-related fields. The AFM is a mechatronic microscope that is able to interrogate the surface of physical samples to produce 3D images with atomic resolution. It typically contains a cantilever with a sharp probe tip of a few nanometers in diameter, a nanopositioner that scans the probe across the sample surface and an optical deflection sensor that measures the cantilever tip deflections during a scan. Commercial AFM designs are based on macro-scale technologies. Their high purchase cost makes them inaccessible to individuals and organizations outside specialized scientific disciplines. In this talk we report on our recent efforts to develop a complete portable AFM using microelectromechanical systems (MEMS) technology. Such a device has the potential to expand the use of AFM within existing scientific applications and allow it to be introduced into a range of new roles. We will discuss the mechatronic aspects of the design of such a system and the associated control design challenges.