A Novel Control Approach for High-Precision Positioning of a Piezoelectric Tube Scanner.

Habibullah,Hemanshu Roy Pota,Ian R. Petersen

IEEE Transactions on Automation Science and Engineering（2017）

引用 33|浏览7

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摘要

An optimal controller for high-precision spiral positioning of a piezoelectric tube scanner used in an atomic force microscope (AFM) is proposed in this paper. In the proposed control scheme, a second-order vibration compensator is incorporated with the piezoelectric tube scanner (PTS) to suppress the vibration of the PTS at the resonant frequency. An internal model of a reference sinusoidal signa...

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关键词

Spirals,Electron tubes,Vibrations,Imaging,Tracking,Resonant frequency,Software

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