Flatness-Based Active Vibration Control for Piezoelectric Actuators

The accuracy and resolution of metrological devices (coordinate measuring machines -CMM-, interferometers, etc.) are greatly affected by their robustness to external vibrations. This is especially important in the case of micrometric and nanometric microscopes, such as atomic force microscopes (AFM). In such cases, active vibration control strategies are frequently used, requiring actuators capabl...