Detection Of Defects In Optics Based On Scanning

In this paper, a method to detect internal pocks and bubbles of optical elements based on laser line source scanning is proposed. In dark field environment, a laser line source is used to illuminate from one side of the glass under test, a high-resolution CCD camera is used to take pictures in front of the glass sample. Images which contain information of defects are acquired through rough scanning and accurate scanning. Accurate three-dimensional coordinates of the internal defects are acquired after image processing, which descript the characteristic information of internal defects quantificationally. Compared with the microscope imaging measurement, this proposed detection of defects in optics based on laser line source scanning has a relative aberration smaller than 2%. In addition, the detection time is approximately reduced to 20 minutes from 1 hour dramatically. The analysis indicates that the error of the position of defects is much smaller than the size of them, which means the position of the defects can be acquired accurately by this approach.