3UHFLVLRQ &KDUJH 'ULYH ZLWK /RZ)UHTXHQF \ 9ROWDJH)HHGEDFN IRU /LQHDUL]DWLRQ RI 3LH]RHOHFWULF +\VWHUHVLV

2 A new charge drive circuit is proposed that utilizes a low frequency voltage feedback loop to linearize piezoelectric hysteresis down 0.1 Hz. This approach eliminates many of the present difficulties and allows extremely low transition frequencies without a long transient response. Experimental results demonstrate that the proposed charge amplifier can effectively reduce piezoelectric hysteresis and creep to less than 1.3% at scan-rates of 10 Hz, 1 Hz, and 0.1 Hz.