A sensorized /spl mu/electro discharge machined superelastic alloy microgripper for micromanipulation: simulation and characterization

This paper describes a novel microgripper, fabricated in a superelastic alloy (Ni/sub 50.8/Ti/sub 49.2/) by wired micro Electro Discharge Machining (/spl mu/EDM). The main features of the new microgripper are the use of a superelastic alloy to improve flexure performance by lowering stresses induced and the /spl mu/EDM fabrication technique. The microgripper was sensorized with commercial semiconductor strain-gauges and implemented in a force-feedback micromanipulation workstation developed in the authors' laboratory. Both FEM simulations and the results of experimental characterization in position and force are presented.