Low-Loss Microcoax-to-CPW Transition for Air-gapped Microcoaxial Passives
Microwave and Wireless Components Letters, IEEE(2015)
摘要
This letter presents the detailed design and characterization of microcoax-to-coplanar waveguide (CPW) transition for air-gapped microcoaxial passives. The microcoax-to-CPW transition is fabricated by multilayer Cu Damescene process with a low thermal budget and fully compatible with CMOS back-end-of-line (BEOL) process. The fabricated microcoax-to-CPW transition has demonstrated an insertion loss less than 0.25 dB and return loss better than 30 dB in frequency range from 0.1 to 40 GHz. The characteristic impedance of the microcoax-to-CPW transition is well matched to 50 . The low loss transition can serve as the essential interface for integration of microcoaxial passives with the conventional monolithic microwave integrated circuits (MMICs).
更多查看译文
关键词
Characeteristic impedance,MMICs,microcoaxial passives,s-parameters,transitions
AI 理解论文
溯源树
样例
生成溯源树,研究论文发展脉络
Chat Paper
正在生成论文摘要