Optomechanical sensing of wine-glass modes of a BAW resonator
Inertial Sensors and Systems（2015）
摘要
A critical element for inertial navigation is precise knowledge of the angular kinematics which are measured using gyroscopes. Optomechanics has been shown to be the most sensitive scheme for measuring mechanical motion [1, 2]. In this paper, we demonstrate electrostatic actuation and optical sensing of orthogonal wineglass modes on a silicon-on-insulator (SOI) platform as a fundamental building block for a Coriolis force measuring z-axis bulk acoustic wave (BAW) gyroscope [3]. To measure the wineglass modes, we monitor the laser light modulation from changes in the waveguide to ring resonator coupling due to the mechanical motion.
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关键词
coriolis force,acoustic resonators,bulk acoustic wave devices,electrostatic actuators,fibre optic gyroscopes,inertial navigation,optical modulation,optical resonators,optical waveguides,silicon-on-insulator,baw resonator,angular kinematics,electrostatic actuation,laser light modulation,optical sensing,optomechanical sensing,orthogonal wineglass modes,ring resonator coupling,silicon-on-insulator platform,z-axis bulk acoustic wave gyroscope,baw,coriolis,optomechanics,wineglass,adaptive optics
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