Creep of parylene-C film
Solid-State Sensors, Actuators and Microsystems Conference（2011）
摘要
The glass transition temperature of as-deposited parylene-C is first measured to be 50°C with a ramping-temperature-dependent modulus experiment. The creep behavior of parylene-C film in the primary and secondary creep region is then investigated below and above this glass transition temperature using a dynamic mechanical analysis (DMA) machine Q800 from TA instruments at 8 different temperatures: 10, 25, 40, 60, 80, 100, 120 and 150°C. The Burger's model, which is the combined Maxwell model and Kelvin-Voigt model, fits well with our primary and secondary creep data. Accordingly, the results show that there's little or no creep below the glass transition temperature. Above the glass transition temperature, the primary creep and creep rate increases with the temperature, with a retardation time constant around 6 minutes.
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关键词
creep fracture,glass transition,viscoelasticity,kelvin-voigt model,maxwell model,as-deposited parylene-c,creep behavior,dynamic mechanical analysis machine,glass transition temperature,ramping-temperature-dependent modulus experiment,temperature 10 degc,temperature 100 degc,temperature 120 degc,temperature 150 degc,temperature 25 degc,temperature 40 degc,temperature 50 degc,temperature 60 degc,temperature 80 degc,creep,parylene-c,strain,glass,kelvin voigt model,plastics,stress,dynamic mechanical analysis,time constant,temperature measurement,mathematical model
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