Microelectromagnetic energy harvester with integrated magnets

Qide Zhang,S J Chen,Lukas Baumgartel,A Lin,Eun Sok Kim

Solid-State Sensors, Actuators and Microsystems Conference（2011）

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摘要

This paper presents a microelectromagnetic power generator with integrated magnets that can be fabricated on silicon wafers in a batch process. The generator is fabricated by MEMS technologies and characterized at different vibration frequencies, amplitudes and load resistances. This compact generator occupies a volume of 15×13×0.4mm3, as no external permanent magnets are needed. Experimental results show that with a 20-turn spiral coil, the device can generate an induced electromotive force (EMF) of 0.27mV at a vibration frequency and amplitude of 350Hz and 10μm, respectively.

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关键词

electric potential,energy harvesting,magnets,microfabrication,micromechanical devices,vibrations,20-turn spiral coil,emf,mems technology,frequency 350 hz,induced electromotive force,integrated magnets,microelectromagnetic energy harvester,microelectromagnetic power generator,size 10 mum,vibration frequency,voltage 0.27 mv,energy harvester,powders,power generation,permanent magnet,generators,batch process,silicon wafer,electromagnetics,magnetic flux

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