On-chip RF power inductors with nanogranular magnetic cores using prism-assisted UV-LED lithography

Daniel V Harburg,G Rezwan Khan,Florian Herrault,Jungkwun Kim,Christopher G Levey,Charles R Sullivan

Solid-State Sensors, Actuators and Microsystems（2013）

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摘要

This paper presents a CMOS-compatible microfabrication process for on-silicon racetrack power inductors using prism-assisted lithography with an ultraviolet light-emitting diode (UV-LED) array as a light source. This combination of lithographic techniques was applied in making 60-μm-tall SU-8 structures with 45° sidewalls to achieve high performance from a sputtered nanogranular magnetic core material, Co-Zr-O. Microfabricated magnetic components with Co-Zr-O cores were designed, built, and tested for use in a 25-W dc-dc power converter operating at a switching frequency between 5-30 MHz. Fabricated inductors achieved a peak quality factor of 18 and an inductance of 660 nH at 15 MHz.

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关键词

cmos integrated circuits,dc-dc power convertors,inductors,light emitting diodes,light sources,magnetic cores,microfabrication,optical prisms,switching convertors,ultraviolet lithography,cmos compatible microfabrication process,co-zr-o,dc-dc power converter,su-8 structure,light source,lithographic technique,on-chip rf power inductor,on-silicon racetrack power inductor,power 25 w,prism assisted uv-led lithography,size 60 mum,sputtered nanogranular magnetic core material,ultraviolet light emitting diode array,micro-fabricated inductor,uv-led lithography,integrated power converter,magnetics,power supply on chip,prism-assisted lithography,thin-film inductor,silicon,lithography,system on chip

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