A tunable MEMS THz waveplate based on isotropicity dependent metamaterial

Solid-State Sensors, Actuators and Microsystems(2013)

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摘要
This paper reports a micromachined metamaterial which is tunable between anisotropic and isotropic state. The tuning rescales the metamaterial lattice constant instead of changing the element structure. It realizes a resonance independent change of transmission and tunes the transmitted phase of polarized THz wave. The transmission decreases from 15% to 0 for circularly polarized wave and tunes transmitted phase up to tens of degrees for linearly polarized wave. The tunable metamaterial can be potentially applied as a THz switch, tunable attenuator and waveplate.
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关键词
electromagnetic wave polarisation,electromagnetic wave transmission,micromachining,micromechanical devices,submillimetre wave devices,terahertz metamaterials,terahertz wave devices,thz switch,thz wave polarization,anisotropic state,isotropic state,isotropicity dependent metamaterial,metamaterial lattice constant,micromachined metamaterial,phase transmitted tuning,tunable mems thz waveplate,tunable attenuator,mems,metamaterial,thz,anisotropic,isotropic,polarization
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