Interrogating and manipulating at the nanometre scale — From scientific instrumentation to industrial applications

Solid-State Sensors, Actuators and Microsystems(2013)

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摘要
Microfabricated instruments featuring functional elements at the nanometre scale are ideally suited to interrogate and manipulate objects in the small domain. This ability would also be attractive and open new opportunities for industrial applications. However, robustness of the instrument and their currently low throughput are considered as almost insurmountable obstacles for a successful implementation in many commercial fields. Here, scientific instrumentation in harsh, demanding environments can play a pivotal role in validating the concept and demonstrating the reliability of the instrument. This is highlighted in two examples, one in medicine and one in planetary science.
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关键词
microfabrication,micromechanical devices,reliability,functional element,harsh environment,industrial application,instrument microfabrication,instrument reliability,nanometre scale,object interrogation,object manipulation,scientific instrumentation,microelectromechanical systems (mems),minimal invasive instruments,nanotools,space application,force,microscopy,mars
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