A Fabry-Perot refractometer for chemical vapor sensing by solid-phase microextraction

Raphael Stgelais,G Mackey,John Saunders,Jian Zhou,A Leblanchotte,Alexandre Poulin,Jack A Barnes,H P Loock,R S Brown,Yvesalain Peter

Optical MEMS and Nanophotonics（2011）

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摘要

The contour lithography method [1] is used to improve the fabrication yield of previously demonstrated [2] microfluidic Fabry-Perot (FP) refractive index (RI) sensors. The sensors are then coated with polydimethylsiloxane (PDMS) based polymers to detect vapor analytes by solid-phase microextraction (SPME). Preliminary characterization of devices coated with two different polymers and exposed to xylenes vapors yields a maximum sensitivity of 0.015 nm/ppm and a detection limit below 120 ppm.

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关键词

antireflection coatings,gas sensors,lithography,micro-optomechanical devices,microfluidics,microsensors,optical fabrication,optical polymers,optical sensors,refractive index measurement,refractometers,fabry-perot refractometer,chemical vapor sensing,contour lithography method,microfluidic fabry-perot refractive index sensors,polydimethylsiloxane polymers,solid-phase microextraction,vapor analytes detection,xylenes vapors,chemical sensors,fabry-perot,microoptics,optical device fabrication,plastics,silicon,fabry perot,fabrication,optical sensor

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