Ultrafine motion detection of micromechanical structures using optical moire patterns
Photonics Technology Letters, IEEE（1996）
摘要
The use of optical Moire patterns for motion and microtribology detection of micromechanical devices has been proposed and demonstrated, Using a very simple image processing technique, 50-nm in-plane motion of a micromechanical sensor has been detected, With an improved device design, the spatial resolution for in-plane motion detection will be able to reach 10 nm, meeting the most stringent requirement for any known applications for microelectromechanical systems (MEMS).
更多查看译文
关键词
image processing,light interferometry,mechanical variables measurement,micromechanical devices,moire fringes,object detection,optical noise,optical sensors,tribology,CCD image sensors,microelectromechanical systems,micromechanical structures,microtribology detection,motion detection,optical moire patterns,ultrafine motion detection
AI 理解论文
溯源树
样例
生成溯源树，研究论文发展脉络
Chat Paper
正在生成论文摘要