NEMS optical cross connect (OXC) driven by opticl force

Hongyuan Cai,J X Lin,J H Wu,Bo Dong,Y D Gu,Z C Yang, Y F Jin,Y L Hao,D L Kwong,A Q Liu

Micro Electro Mechanical Systems（2015）

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摘要

This paper presents a compact silicon-photonic based optical cross connect (OXC) driven by the optical gradient force. Each switch element consists of a waveguide-crossing-coupled micro-ring resonator and a suspended arc. The device is fabricated with a standard CMOS compatible process using deep-UV 248-nm lithography with a double-etch technique. A switching time of 0.24 μs is experimentally demonstrated. The proposed switch topology of the interconnections has potentials of employing a single wavelength channel or multiple wavelength channels, and provides channel selection from sets of input fibers and sets of output fibers.

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关键词

cmos integrated circuits,elemental semiconductors,integrated optics,micromechanical resonators,nanoelectromechanical devices,optical interconnections,optical switches,optical waveguides,silicon,ultraviolet lithography,nems optical cross connect,si,compact silicon-photonic based optical cross connect,deep-uv lithography,double etch technique,interconnections,optical gradient force,standard cmos compatible process,suspended arc,switch topology,switching time,time 0.24 mus,waveguide-crossing-coupled microring resonator,wavelength 248 nm,force,optical fibers

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