Fabrication technology and properties of rare earth giant magnetostrictive films based on MSAW application

SiHe Chen,BaiYang Zhou,Bin Y. Zheng,Deng Yang Wu,Liang Q. Lin,Mei Lin

Piezoelectricity, Acoustic Waves and Device Applications（2010）

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摘要

Rare earth giant magnetostrictive thin films (RGMFs) belong to a new type of electro (magnetic) - mechanical conversion functional materials. Such materials have broad application prospects in magnetic surface acoustic wave (MSAW) devices. In this paper, RGMFs samples are fabricated by ion beam sputtering deposition (IBSD). In order to improve the magnetic sensitivity, films after forming are heat-treated at different temperatures in vacuum condition. RGMFs magnetic hysteresis loops and static magnetostriction characteristics are measured by DWS type ultra precision displacement meter and Alternating Gradient Magnetometer respectively. For the purpose of developing better functional thin films aimed at MSAW devices, preparation technology and effect on static-dynamic magnetostriction characteristics of RGMFs samples by vacuum annealing treatment are primary studied. The results indicate that static-dynamic magnetostrictive characteristics of RGMFs are closely related to factors such as preparation technology, sputtering position, and vacuum sensitivity enhancing technology, etc.

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关键词

sputtering position,ion beam sputtering deposition,static-dynamic magnetostriction,static magnetostriction,sputter deposition,magnetic sensitivity,electromechanical conversion functional materials,annealing,magnetic hysteresis loops,magnetic thin films,magnetostriction,rgmfs,vacuum sensitivity enhancing technology,ferromagnetic materials,rare earth giant magnetostrictive films,iron alloys,magnetic surface acoustic wave devices,tbdyfe2,smfe2,msaw devices,magnetic hysteresis,metallic thin films,dysprosium alloys,heat-treatment,msaw application,vacuum annealing treatment,magnetostrictive characteristics,samarium alloys,terbium alloys,magnetic-mechanical conversion functional materials,thin film,electro magnetic,ion beam,magnetic properties,saturation magnetization,surface acoustic wave,heat treatment

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