Fast Transistor Threshold Voltage Measurement Method for High-Speed, High-Accuracy Advanced Process Characterization

IEEE Transactions on Very Large Scale Integration Systems, 2014.

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Keywords:
mobility enhancementoptimized interpolation algorithmlocal process variationsemiconductor device measurementdevice-under-testsMore(28+)

Abstract:

As process technologies continually advance, process variation has greatly increased and has gradually become one of the most critical factors for IC manufacturing. Furthermore, these increasingly complex processes continue to make greater use of stressors for mobility enhancement, thus requiring large volumes of data for extensive charac...More

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