Numerical Simulation of Laser Shock Cleaning Process for Micro-Scale Particle Removal

Recent studies have demonstrated that micro/nano-scale particles can be removed effectively from solid surfaces by laser-induced plasma shockwaves. This work proposes a two-dimensional theoretical model for numerical simulation of the hydrodynamics and particle behavior in the laser shock cleaning process. The spatial variation of the cleaning efficiency on the surface and the pressure/temperature/velocity fields are analyzed by numerical simulation. Furthermore, the model predicts the trajectory of the detached particles after the shockwave passage. Parametric studies are conducted to examine the effect of such process parameters as the laser pulse energy and the spot size on the cleaning process, with discussion of optimal cleaning conditions. (C) Koninklijke Brill NV, Leiden, 2008.