Effect of thin Si insertion at metal gate/high-k interface on electrical characteristics of MOS device with La2O3
Microelectronic Engineering(2011)
摘要
The effect of a thin Si layer insertion at W/La"2O"3 interface on the electrical characteristics of MOS capacitors and transistors is investigated. A suppression in the EOT increase can be obtained with Si insertion, indicating the inhibition of diffusion of oxygen atoms into La"2O"3 layer by forming an amorphous La-silicate layer at the W/La"2O"3 interface. In addition, positive shifts in V"f"b and V"t"h caused by Si insertion implies the formation of amorphous La-silicate layer at the top of La"2O"3 dielectrics reduces the positive fixed charges induced by the metal electrode. Consequently, a large improvement in mobility has been confirmed for both at peak value and at high E"e"f"f of 1MV/cm with Si inserted nFETs. Although a degradation trend on EOT scaling has been observed, the insertion of thin Si layer is effective in pushing the scaling limit.
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关键词
positive shift,thin si layer,eot increase,electrical characteristic,metal gate,high-k interface,mos capacitor,positive fixed charge,mos device,thin si layer insertion,eot scaling,thin si insertion,si insertion,amorphous la-silicate layer,scaling limit,high k
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