A photonic nano-Bragg grating device integrated with microfluidic channels for bio-sensing applications

MICROELECTRONIC ENGINEERING(2009)

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摘要
A photonic wire Bragg grating structure, integrated with fluidic channels and reservoirs for fluid sensing based on refractive index changes, has been designed using 3-D Finite Domain Time Difference (FDTD) method and fabricated using electron beam lithography and reactive ion etching on an Silicon-on-Insulator (SOI) material. A scheme is developed where a Polydimethylsiloxane (PDMS) microfluidic chip is integrated with the SOI photonic chip via a reversible active sealing method. The highest sensitivity (@Dn/@D@l) of the device is estimated to be 5.5x10^-^3 nm^-^1 and the volume of the sensing region is approximately 2@mm^3. This device could be a potential candidate for lab-on-a-chip devices for bio-sensing applications.
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关键词
lab-on-a-chip device,microfluidic chip,bragg grating structure,bio-sensing application,photonic wire,electron beam lithography,soi photonic chip,fluidic channel,3-d finite domain time,photonic nano-bragg,bragg grating photonic band-gap nano-biosensor lab-on-a-chip microfluidic micro total analysis systems optofluidic systems,microfluidic channel,highest sensitivity,chip,silicon on insulator,microfluidic,lab on a chip,reactive ion etching,bragg grating,photonic band gap,refractive index
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