High-Accuracy Wide-Range Gas Refractive Index Sensor Based on All-solid Fabry-Pérot Interferometer
IEEE Sensors Journal（2025）
State Key Laboratory of Dynamic Measurement Technology
Abstract
The gas refractive index (RI) sensors with wide measurement ranges and high sensing accuracy are urgently required for biomedical and industrial applications. Here, we propose an open Fabry-Perot interferometer (FPI) gas RI sensor, which is prepared by bonding three layers of titanium-silicate glasses together using light contact bonding technology to improve its structural strength. The medium's RI within the FPI can be ascertained by measuring the spectral shift. The sensor has a sensitivity of 1527.2155 nm/RIU in the range of 1.000268627-1.026779627, with a relative error of 0.094% F.S. and an RI resolution of 1.3 × 10-5 RIU, which allows it to meet the sensing needs of most gases. Furthermore, we investigate the high-temperature characteristics of the sensor and find that it has low temperature cross-sensitivity of 0.06 nm/°C in the range of 20-200°C. Therefore, the sensor is suitable for RI detection in the field of chemical industry, biosensing, and many harsh environments.
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Key words
Fiber optic Fabry-Perrot interferometer,Gas refractive index sensor,High thermal stability,Wide detection range
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