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Thermal Conductivity Detector (Tcd)-Type Gas Sensor Based on a Batch-Fabricated 1D Nanoheater for Ultra-Low Power Consumption

SSRN Electronic Journal(2022)

Cited 7|Views15
Key words
Gas sensor,Ultralow power,Suspended 1D nanoheater,Thermal conductivity detector,Pulse -width modulation,Batch fabrication
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