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Modeling and Calibration of the Galvanometric Laser Scanning Three-Dimensional Measurement System

Nanomanufacturing and Metrology(2018)

State Key Laboratory for Manufacturing System Engineering

Cited 32|Views10
Abstract
The traditional three-dimensional measurement system based on linear-structured light usually involves mechanical scanning platforms to perform the linear scanning, which make the structure of the system huge and complicated. The emergence of the galvanometric laser scanner solves the problem by using a galvanometer to replace the mechanical scanning platform. The employment of the galvanometer can improve the speed of scanning and simplify the structure of the system. However, there are few approaches available to calibrate this kind of system. In this paper, a high-precision calibration method is proposed to calibrate the galvanometric laser scanning three-dimensional measurement system. A precision motorized linear stage and a planar target are applied in this method. The planar target is used for the camera calibration based on Zhang’s method and the precision motorized linear stage for the laser plane calibration. The validity and accuracy of this method are evaluated by scanning the standard component. The experiments conducted suggest that the proposed method is valid and accurate for the calibration of the galvanometric laser scanning system.
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Key words
Galvanometer,Linear-structured light,System calibration,Laser scanner
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