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Performance Improvement of Monolithic CFET by Backside Enhanced Contact with C-type Source/Drain Contact Technology

Jie Xu, Lei Cao, Yuzhe Yu, Qingkun Li, Hang Zhang, Lianlian Li,Kun Luo,Qingzhu Zhang,Zhenhua Wu,Huaxiang Yin

2025 Conference of Science and Technology of Integrated Circuits (CSTIC)（2025）

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关键词
monolithic CFET,backside enhanced contact,C-type source/drain contact,on-current
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