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Hybrid-driven Modeling Using a BiLSTM-AdaBoost Algorithm for Diameter Prediction in the Constant Diameter Stage of Czochralski Silicon Single Crystals.

Yu-Yu Liu,Ding Liu, Shi-Hai Wu, Yi-Ming Jing

Scientific reports(2025)

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Key words
Czochralski silicon single crystals,Mechanistic modeling,Hybrid drive modeling,Long short-term memory network,Adaptive boosting algorithms
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