Design and Modeling of CMUTs with T-shape Cavities for Low Working Voltage, High Ultrasound Transmission and Reception

Zhikang Li, Shaohui Qin, Jiawei Yuan,Jie Li, Yihe Zhao, Hongqiang Tan, Zixuan Li, Zheng Yuan, Ruiyan Luo, Hefeng Qin,Min Li,Libo Zhao

IEEE Sensors Journal（2025）

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关键词

Capacitive micromachined ultrasonic transducers (CMUTs),T-shape cavities,electrostatic stiffness softening effects (ESSE),working voltage

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