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A Comprehensive Study on the Polarization, Reliability, and Switching Dynamics of Helium Ion-Bombardment HfZrOx Ferroelectric Films

Peiyuan Du,Huan Liu, Dongya Li,Chengji Jin, Hongrui Zhang, Di Wang, Yian Ding,Bing Chen,Ran Cheng, Mengnan Ke,Yan Liu,Xiao Yu,Yue Hao,Genquan Han

IEEE Transactions on Electron Devices（2025）

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关键词
Endurance,ferroelectric (FE),He ion,ion bombardment
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