SV-SAW RF Filters Based on Low-Cost 128°Y LiNbO3/SiO2/poly-Si/Si Substrate for 6G Cmwave Wireless Communications

Kai Yang, Jie Chen, Juan Wang, Fuhong Lin, Jiming Fang, Meijuan Li, JunYan Zheng, Zijun Ren, Fangsheng Qian,Haiding Sun,Yansong Yang,Chengjie Zuo

Microsystems & nanoengineering（2025）

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