Focal Plane Array Based on Silicon Nitride for Optical Beam Steering at 2 Microns

Qing Gao, Jiaqi Li, Jincheng Wei, Jinjie Zeng, Dong Yang, Xiaoqun Yu, Mingshen Peng, Hongwen Xuan,Ruijun Wang,Yanfeng Zhang

Photonics（2025）

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2 μm waveband,silicon nitride,on-chip beam steering,focal plane array,free-space optical communication and networking technology

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