Chrome Extension
WeChat Mini Program
Use on ChatGLM
VIPCreated with Sketch.

Effect of CO2 Addition to Ar on Gas Cluster Ion Beam Sputtering of a Si Wafer: an In-Situ XPS Study

Byeong Jun Cha,Sang Ju Lee,Chang Min Choi,Cheolho Jeon,Young Dok Kim,Myoung Choul Choi

Applied Surface Science Advances（2025）

Cited 0|Views4
Key words
CO2,Gas cluster ion beam,In-situ XPS,Secondary ion mass spectrometry,Carbon contamination
AI Read Science
Must-Reading Tree
Example
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined