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Eliminating Nucleation Delay for Atomic Layer-Deposited Low-Defect Dense Multi-Component Thin Films Through Preoccupation of Interstitial Sites.

Guoping Su, Haoyan Chen,Honglong Ning, Xiao Fu, Muyun Li, Yuexin Yang,Zhihao Liang,Rihui Yao,Junbiao Peng

ACS applied materials & interfaces（2025）

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