A Hybrid MEMS Microphone Combining Piezoelectric and Capacitive Transduction Mechanisms

Yangyang Guan,Sina Sadeghpour,Chen Wang,Hemin Zhang, Sanjog Vilas Joshi, Milad Shojaeian, Xinyu Wu, Ruochen Ding,Christ Glorieux,Michael Kraft

Journal of Microelectromechanical Systems（2025）

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Hybrid microphone,sensitivity,piezoelectric transduction,capacitive transduction,minimum detectable pressure (MDP),signal-to-noise ratio (SNR)

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