Scale Interdigital Transducer-based Micro-Acoustic Resonators into Mmwave Applications
IEEE transactions on ultrasonics, ferroelectrics, and frequency control（2025）
关键词
High order Lamb wave modes,Interdigital transducers (IDTs),LiNbO 3 thin films,mmWave applications,Electromagnetic (EM) self-resonances,Self-inductance
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