An Ultrasonic Wireless Power Transmission System with High Conversion Efficiency Based on 30% ScAlN Piezoelectric MEMS Transducers
2025 IEEE 38th International Conference on Micro Electro Mechanical Systems (MEMS)（2025）
关键词
Piezoelectric Micromachined Ultrasonic Transducer (PMUT),Ultrasound,Power Transmission,Implantable
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