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Highly Efficient AlGaInP-Based Micro-LEDs Achieved by Plasma Sidewall Treatment

Min-Hua Li,Xi Zheng, Kang Zhang, Chen-Ming Zhong, Zhi-Cheng Lu,Yi-Jun Lu,Zhong Chen,Wei-Jie Guo

IEEE Transactions on Electron Devices（2025）

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关键词
AlGaInP,argon plasma,red micro-LEDs,sidewall treatment
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