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Microelectromechanical Gas Sensor of Resistive Type for Detection of Hydrogen Sulphide Low Concentrations

I. A. Lazdin,A. S. Kondrateva,I. M. Komarevtsev, Ya B. Enns,A. N. Kazakin,P. A. Karaseov

ST PETERSBURG POLYTECHNIC UNIVERSITY JOURNAL-PHYSICS AND MATHEMATICS（2024）

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关键词
microelectromechanical systems,gas sensor,nickel oxide,hydrogen sulfide
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