Multi-scale Simulation of Displacement Damage of Spatially-Correlated Recoiled Atoms in Silicon

Fang Liu, Tao Wang,Huan He, Yurong Bai,Tan Shi, Pingan Zhou, Chuanhao Chen,Chaohui He,Hang Zang

RADIATION EFFECTS AND DEFECTS IN SOLIDS（2025）

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Multi-scale modeling, displacement cascade, defect annealing, defect cluster, cascade interaction

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