DRAM Technology & Design Optimization for Sub-10nm and Beyond

Minsoo Yoo,Sulhwan Lee, Aeri Son, Shingyu Choi,Choongki Kim,Kyoungchul Jang, Kangsik Choi,Yongtaik Kim, Weonchul Jeon, Seonsoon Kim, Youngman Cho,Choonhwan Kim, Ilsup Jin,Seonyong Cha, Jonghwan Kim

2024 IEEE International Electron Devices Meeting (IEDM)（2024）

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Key words

DRAM Technology,Capacity Of Cells,Design Solutions,Limited Scale,Data Retention,Dry Etching,Technology Node

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