An Experimentally Validated TCAD Variability Study of the Relative Performance of In-Ga-Zn-O and Poly-Si-Channel Ferroelectric VNANDs
2024 IEEE International Electron Devices Meeting (IEDM)（2024）
关键词
Crystallite,polySia,Thin Films For Applications,Grain Size,Correlation Function,Work Function,Average Grain,Average Grain Size,Schottky Barrier,Gaussian Random Field,Law Exponent,Oxide Interface,Channel Thickness,Memory Window
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