Scintillator-Free Electron Detection and Counting Using Single-Photon Avalanche Diodes
2024 IEEE International Electron Devices Meeting (IEDM)（2024）
Key words
Avalanche Diode,Single-photon Avalanche Diode,Electron Microscopy,Electron Energy,Detection Probability,Single Electron,Electron Counting,Energetic Electrons,High-speed Microscopy,Function Of Time,Electron Hole Pairs,Dielectric Layer,Count Rate,Beam Current,Incident Electron,Si Layer,Dark Count Rate
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