Modeling Dual-SiOxN Thin-Film Edge Coupler with Ultra-Low Loss and Large Alignment Tolerance Zhaozhen Chen,Xin Fu,Lei Zhang,Zhengsheng HanPhotonics(2025)引用 0|浏览2关键词edge couplers,silicon photonics,silicon nitride,silicon oxynitrideAI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要