Virtual_N2_PDK: A Predictive Process Design Kit for 2-Nm Nanosheet FET Technology

Yiying Liu,Minghui Yin,Huanhuan Zhou,Yunxia You, Weihua Zhang,Hongwei Liu,Chen Wang, Yajie Zou, Zhiqiang Li

IEEE TRANSACTIONS ON VERY LARGE SCALE INTEGRATION (VLSI) SYSTEMS（2025）

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Key words

Backside power delivery network (BSPDN),interconnects,nanosheet FET (NSFET),nanosheet FET (NSFET),process design kit (PDK),process design kit (PDK),ruthenium (Ru),ruthenium (Ru),technology computer-aided design (TCAD),technology computer-aided design (TCAD),wrap-around contact (WAC),wrap-around contact (WAC),wrap-around contact (WAC)

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